Mask frame assembly for thin film deposition
    2.
    发明授权
    Mask frame assembly for thin film deposition 有权
    用于薄膜沉积的面罩框组件

    公开(公告)号:US08746169B2

    公开(公告)日:2014-06-10

    申请号:US12986894

    申请日:2011-01-07

    CPC classification number: C23C14/042 C23C14/12 C25D1/10 G03F1/10 H01L51/0011

    Abstract: A mask frame assembly for thin film deposition includes a frame having an opening and at least two unit masks having end parts in a longitudinal direction fixed to the frame, each of the unit masks comprising first regions and second regions, the first regions having unit masking patterns, each of the unit masking patterns having a plurality of openings for thin film deposition, the unit masking pattern being spaced apart from each other, each of the second regions being interposed between a pair of adjacent ones of the first regions, the first regions having a first thickness from a first surface of the unit masks, and at least a portion of the second regions having a second thickness from a second surface of the unit masks opposite to the first surface of the unit masks, such that the first regions and the at least the portion of the second regions are offset from each other in a direction normal to the first and second surfaces. A plurality of unit masks are each half etched from different surfaces and thus a height of wrinkles generated in the mask of the mask frame assembly may be reduced.

    Abstract translation: 用于薄膜沉积的掩模框架组件包括具有开口的框架和至少两个单元掩模,其具有沿着固定到框架的纵向方向上的端部,每个单元掩模包括第一区域和第二区域,第一区域具有单元屏蔽 图案,每个单位掩模图案具有多个用于薄膜沉积的开口,单元掩模图案彼此间隔开,每个第二区域插入在一对相邻的第一区域之间,第一区域 具有来自所述单元掩模的第一表面的第一厚度,并且所述第二区域的至少一部分具有来自所述单元的第二表面的第二厚度,掩模与所述单元掩模的第一表面相反,使得所述第一区域和 所述第二区域的至少所述部分在垂直于所述第一和第二表面的方向上彼此偏移。 多个单元掩模每个从不同的表面被半蚀刻,因此可以减少在掩模框组件的掩模中产生的皱纹的高度。

    MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION
    3.
    发明申请
    MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION 有权
    用于薄膜沉积的掩模框架组件

    公开(公告)号:US20110168087A1

    公开(公告)日:2011-07-14

    申请号:US12986894

    申请日:2011-01-07

    CPC classification number: C23C14/042 C23C14/12 C25D1/10 G03F1/10 H01L51/0011

    Abstract: A mask frame assembly for thin film deposition includes a frame having an opening and at least two unit masks having end parts in a longitudinal direction fixed to the frame, each of the unit masks comprising first regions and second regions, the first regions having unit masking patterns, each of the unit masking patterns having a plurality of openings for thin film deposition, the unit masking pattern being spaced apart from each other, each of the second regions being interposed between a pair of adjacent ones of the first regions, the first regions having a first thickness from a first surface of the unit masks, and at least a portion of the second regions having a second thickness from a second surface of the unit masks opposite to the first surface of the unit masks, such that the first regions and the at least the portion of the second regions are offset from each other in a direction normal to the first and second surfaces. A plurality of unit masks are each half etched from different surfaces and thus a height of wrinkles generated in the mask of the mask frame assembly may be reduced.

    Abstract translation: 用于薄膜沉积的掩模框架组件包括具有开口的框架和至少两个单元掩模,其具有沿着固定到框架的纵向方向上的端部,每个单元掩模包括第一区域和第二区域,第一区域具有单元屏蔽 图案,每个单位掩模图案具有多个用于薄膜沉积的开口,单元掩模图案彼此间隔开,每个第二区域插入在一对相邻的第一区域之间,第一区域 具有来自所述单元掩模的第一表面的第一厚度,并且所述第二区域的至少一部分具有来自所述单元的第二表面的第二厚度,掩模与所述单元掩模的第一表面相反,使得所述第一区域和 所述第二区域的至少所述部分在垂直于所述第一和第二表面的方向上彼此偏移。 多个单元掩模每个从不同的表面被半蚀刻,因此可以减少在掩模框组件的掩模中产生的皱纹的高度。

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