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公开(公告)号：US20050097942A1
公开(公告)日：2005-05-12
申请号：US10705332
申请日：2003-11-10
申请人： Christopher Meischner , Nermin Jelacic , Anthony Jones , Timothy Delaney , Scott Butzin , Thomas Muir
发明人： Christopher Meischner , Nermin Jelacic , Anthony Jones , Timothy Delaney , Scott Butzin , Thomas Muir
CPC分类号： G01N11/00 , F01M1/18 , G01N2011/0046 , G01N2011/008 , G01N2015/0675 , G01N2015/0687
摘要： The system for monitoring dilution has a commodity being stored separately from a first fluid. The commodity has a predetermined distinguishing parameter (DP2) and the first fluid has a predetermined distinguishing parameter (DP1) being different from that of the predetermined distinguishing parameter (DP2) of the commodity. During operation of an apparatus the first fluid dilutes the commodity. A monitoring station has a device therein in which the predetermined distinguishing parameter (DP2) of the commodity is distinguished from the predetermined distinguishing parameter (DP1) of the first fluid. The monitoring station has at least one of a display monitor and a recording device.
摘要翻译： 用于监测稀释的系统具有与第一流体分离存储的商品。 商品具有预定的区别参数（DP 2），并且第一流体具有与商品的预定区别参数（DP 2）不同的预定区别参数（DP 1）。 在装置的操作期间，第一流体稀释商品。 监测站具有其中商品的预定区别参数（DP 2）与第一流体的预定区别参数（DP 1）不同的装置。 监视站具有显示监视器和记录装置中的至少一个。
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公开(公告)号：US07017392B2
公开(公告)日：2006-03-28
申请号：US10705332
申请日：2003-11-10
申请人： Christopher R. Meischner , Nermin Jelacic , Anthony Jones , Timothy E. Delaney , Scott A. Butzin , Thomas G Muir
发明人： Christopher R. Meischner , Nermin Jelacic , Anthony Jones , Timothy E. Delaney , Scott A. Butzin , Thomas G Muir
IPC分类号： G01N11/00
CPC分类号： G01N11/00 , F01M1/18 , G01N2011/0046 , G01N2011/008 , G01N2015/0675 , G01N2015/0687
摘要： The system for monitoring dilution has a commodity being stored separately from a first fluid. The commodity has a predetermined distinguishing parameter (DP2) and the first fluid has a predetermined distinguishing parameter (DP1) being different from that of the predetermined distinguishing parameter (DP2) of the commodity. During operation of an apparatus the first fluid dilutes the commodity. A monitoring station has a device therein in which the predetermined distinguishing parameter (DP2) of the commodity is distinguished from the predetermined distinguishing parameter (DP1) of the first fluid. The monitoring station has at least one of a display monitor and a recording device.
摘要翻译： 用于监测稀释的系统具有与第一流体分离存储的商品。 商品具有预定的区别参数（DP 2），并且第一流体具有与商品的预定区别参数（DP 2）不同的预定区别参数（DP 1）。 在装置的操作期间，第一流体稀释商品。 监测站具有其中商品的预定区别参数（DP 2）与第一流体的预定区别参数（DP 1）不同的装置。 监视站具有显示监视器和记录装置中的至少一个。
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公开(公告)号：US20030079527A1
公开(公告)日：2003-05-01
申请号：US10014116
申请日：2001-10-26
发明人： Frank G. Weis , Robert J. Davis
IPC分类号： G01N007/00
CPC分类号： G01N15/06 , G01F23/14 , G01N9/26 , G01N2001/1025 , G01N2015/0675
摘要： A system and method of measuring a level of settled particles in a fluid-containing vessel includes the steps of fluidizing particles from a position below the settled level of particles, and measuring a static pressure of liquid within the vessel at a position in the vessel below the settled level of particles. The fluidized static pressure is correlated to a level of settled particles within the vessel using an experimentally determined relationship. The apparatus includes an inlet pipe into the vessel at a position below the settled level of particles, and a pump which recirculates liquid from the vessel above the submerged level of particles, remote from the settled level of particles, and a static pressure instrument connected to the inlet pipe. A solids pump can be activated to remove settled particles from the vessel, the operation of the pump being controlled by the measured level of settled particles.
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4.发明申请公开(公告)号：US20180059088A1
公开(公告)日：2018-03-01
申请号：US15254925
申请日：2016-09-01
CPC分类号： G01N33/2858 , G01N1/00 , G01N15/06 , G01N21/00 , G01N21/554 , G01N21/77 , G01N21/85 , G01N2015/0675 , G01N2015/0693
摘要： A method and system for detecting mercury in a hydrocarbon-containing fluid stores a sample of the hydrocarbon-containing fluid in a first reservoir. A liquid phase reagent solution is stored in a second reservoir. The liquid phase reagent solution includes nanoparticles with an affinity to mercury, wherein the nanoparticles are suspended as a colloid in the liquid phase reagent solution. The sample of the hydrocarbon-containing fluid is delivered from the first reservoir into a first port of a fluidic device while the liquid phase reagent solution is delivered from the second reservoir into a second port of the fluidic device such that the fluidic device produces slug flow. The slug flow is subject to optical analysis that determines concentration of mercury in the sample of the hydrocarbon-containing fluid.
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公开(公告)号：US06370936B1
公开(公告)日：2002-04-16
申请号：US09303794
申请日：1999-04-30
申请人： Yutaka Yamagishi , Tetsuji Asami , Shigeru Okuda
发明人： Yutaka Yamagishi , Tetsuji Asami , Shigeru Okuda
IPC分类号： G01N100
CPC分类号： G01N1/2252 , G01F25/0053 , G01N1/2202 , G01N15/0618 , G01N2001/2223 , G01N2001/2264 , G01N2015/0046 , G01N2015/0675
摘要： A sampling apparatus for exhaust gas is capable of calibrating two flowmeters each other easily and precisely. A diluting air supply passage for diluting the sampled exhaust gas is connected to an upstream side of a diluting tunnel. A first flowmeter for measuring flow rate of air is provided in the diluting air supply passage. A measuring passage having a filter for capturing particulate matter in the exhaust gas diluted with the diluting air and a second flowmeter for measuring the flow rate of the diluted exhaust gas flowing this filter are connected to a downstream side of the diluting channel. Both flowmeters have high precision. A passage changeover part is provided at the downstream side of the first flowmeter of the diluting air supply passage; a passage changeover part is provided at the upstream side of the second flowmeter in the measuring passage; and a bypass passage is provided between the two passage changeover parts. After calibrating one flowmeter by using a bypass passage, the other flowmeter is calibrated by using the calibrated flowmeter.
摘要翻译： 废气采样装置能够容易且精确地校准两个流量计。 用于稀释采样废气的稀释空气供应通道连接到稀释隧道的上游侧。 用于测量空气流量的第一流量计设置在稀释空气供应通道中。 具有用于捕获用稀释空气稀释的废气中的颗粒物质的过滤器的测量通道和用于测量流过该过滤器的稀释废气的流量的第二流量计连接到稀释通道的下游侧。 两台流量计都具有很高的精度。 在稀释空气供给通道的第一流量计的下游侧设有通路切换部， 在测量通道中的第二流量计的上游侧设置有通道切换部， 并且在两个通道切换部之间设置旁通通路。 通过使用旁路通道校准一个流量计后，使用校准的流量计校准另一个流量计。
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公开(公告)号：US07131343B2
公开(公告)日：2006-11-07
申请号：US10487282
申请日：2002-08-20
IPC分类号： G01N15/00
CPC分类号： G01N15/0266 , G01N1/2202 , G01N15/0272 , G01N15/0656 , G01N2001/2223 , G01N2015/0675
摘要： A method and a device for measuring density properies of a particle distribution, in which method a first parameter relating to the particle distribution is measured at a first measuring point (302), at least part of the flow that passed through the first measuring point is guided to the second measuring point (304), a second parameter relating to the particle distribution is measured at a second measuring point (305), and said first and second parameters relating to the particle distribution are used to determine at least one density property of the particle distribution of the original flow (306).
摘要翻译： 一种用于测量颗粒分布的密度属性的方法和装置，其中在第一测量点（302）测量与颗粒分布相关的第一参数，通过第一测量点的流的至少一部分是 被引导到第二测量点（304），在第二测量点（305）处测量与粒子分布相关的第二参数，并且所述与粒子分布相关的第一和第二参数用于确定至少一个密度属性 原始流的粒子分布（306）。
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7.发明授权Dip cleaning system for a substrate, system for evaluating the amount of particles and method of evaluating the amount of particles adhering to a substrate 失效用于基材的浸渍清洗系统，用于评估颗粒数量的系统和评价附着在基材上的颗粒量的方法公开(公告)号：US06446645B1
公开(公告)日：2002-09-10
申请号：US09584752
申请日：2000-06-01
申请人： Minoru Doi
发明人： Minoru Doi
IPC分类号： B08B300
CPC分类号： H01L21/67253 , B08B3/00 , B08B3/04 , G01N1/38 , G01N15/06 , G01N2015/0675 , H01L21/67057 , Y10S134/902
摘要： There are provided an system for evaluating the amount of particles, a dip cleaning system, and a method of evaluating the amount of particles adhering to a substrate, which enable high-precision quantitative evaluation of the amount of particles suspended in a liquid without use of a monitor substrate, which enable easy determination of the correlation between the amount of particles suspended in the liquid and the amount of particles adhering to the substrate which is an object of cleaning, and which enable low-cost and highly-reliable cleaning evaluation. A residual liquid recovery pan for recovering a residual liquid interposed and a residual liquid quantitative measurement bath for measuring the amount of submerged particles is interposed, between the first substrate treatment bath and the second substrate treatment bath. A sample liquid is prepared by recovering a residual liquid dropped from the substrate by the residual liquid recovery pan and the residual liquid quantitative measurement bath when the substrate is transported from the first substrate treatment bath to the second substrate treatment bath through use of the substrate transportation structure. The sample liquid stored in the pure water metering bath is diluted with a predetermined amount of pure water by means of supplying pure water from the pure water supply source to the pure water metering bath. The amount of particles suspended in the thus-diluted sample liquid is measured through use of the submerged particle counter.
摘要翻译： 提供了一种用于评估颗粒量，浸渍清洗系统和评价粘附在基材上的颗粒数量的方法，该方法能够高度精确地定量评估悬浮在液体中的颗粒数量，而不使用 监视器基板，其能够容易地确定悬浮在液体中的颗粒的量与附着到作为清洁对象的基板的颗粒的量之间的相关性，并且能够进行低成本和高可靠性的清洁评估。 在第一基板处理槽和第二基板处理槽之间插入有用于回收残留液体的残留液体回收盘和用于测量浸没颗粒量的残留液体定量测量槽。 通过使用基板输送将基板从第一基板处理槽输送到第二基板处理槽时，通过残留液体回收盘和残留液体定量测量槽回收从基板滴落的残留液体的样品液体 结构体。 通过从纯水供应源向纯水计量浴提供纯水，将储存在纯水计量槽中的样品液体用预定量的纯水稀释。 通过使用浸没式颗粒计数器测量悬浮在如此稀释的样品液体中的颗粒的量。
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公开(公告)号：US08794048B2
公开(公告)日：2014-08-05
申请号：US13259018
申请日：2010-04-02
IPC分类号： G01N7/00
CPC分类号： G01N1/2252 , G01N2001/2264 , G01N2015/0675
摘要： A system for determining a number of particles includes a diluter arranged at a connecting point of a main flow channel and dilution gas flow channel, a dilution gas flow rate control part that controls the flow rate of the dilution gas introduced into the diluter, a particle number measuring unit that measures a number of solid particles in a diluted exhaust gas, a bypass flow channel that bifurcates from between the diluter and particle number measuring unit in the main flow channel and in which a constant flow rate unit is arranged, and an information processing unit that calculates the dilution factor of the exhaust gas based on a dilution gas flow rate controlled by the dilution gas flow rate control part, and a total of a unit flow rate of the particle number measuring unit and a set flow rate of the constant flow rate unit.
摘要翻译： 用于确定颗粒数量的系统包括布置在主流路和稀释气体流路的连接点处的稀释器，控制引入稀释器的稀释气体的流量的稀释气体流量控制部， 数量测量单元，其测量稀释废气中的固体颗粒的数量;在主流路中的稀释剂和颗粒数测量单元之间分叉并且布置有恒定流量单元的旁路流路;以及信息 处理单元，其基于由稀释气体流量控制部控制的稀释气体流量计算废气的稀释系数，以及粒子数测量单元的单位流量和常数的设定流量的总和 流量单位
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公开(公告)号：US20120090377A1
公开(公告)日：2012-04-19
申请号：US13259018
申请日：2010-04-02
IPC分类号： G01M15/10
CPC分类号： G01N1/2252 , G01N2001/2264 , G01N2015/0675
摘要： Provided is a system for determining a number of particles, which has a simplified and compact structure as well as a reduced cost. The system comprises a diluter (PND2) arranged at a connecting point of a main flow channel (ML) and a dilution gas flow channel (DL), a dilution gas flow rate control part (MFC3) that controls the flow rate of the dilution gas introduced into the diluter (PND2), a particle number measuring unit (2) that measures a number of solid particles in a diluted exhaust gas, a bypass flow channel (BL3) that bifurcates from between the diluter (PND2) and the particle number measuring unit (2) in the main flow channel (ML) and in which a constant flow rate unit (CFO3) is arranged, a suction pump (P) that is connected downstream of a converged point of the main flow channel (ML) and the bypass flow channel (BL3), and an information processing unit (4) that calculates the dilution factor of the exhaust gas based on a dilution gas flow rate (Q1) controlled by the dilution gas flow rate control part (MFC3), and a total of a unit flow rate (Q2) of the particle number measuring unit (2) and a set flow rate (Q3) of the constant flow rate unit (CFO3).
摘要翻译： 提供了一种用于确定颗粒数量的系统，其具有简化且紧凑的结构以及降低的成本。 该系统包括布置在主流路（ML）和稀释气流通道（DL）的连接点处的稀释器（PND2），稀释气体流量控制部分（MFC3），其控制稀释气体的流量 引入到稀释器（PND2）中的粒子数测量单元（2），其测量稀释废气中的固体颗粒数量，从稀释剂（PND2）和测量颗粒数之间分叉的旁路流动通道（BL3） 主流通道（ML）中的单元（2），其中布置有恒流量单元（CFO3）;吸入泵（P），其连接在主流路（ML）的汇聚点的下游， 旁路流路（BL3）以及基于由稀释气体流量控制部（MFC3）控制的稀释气体流量（Q1））计算废气的稀释系数的信息处理单元（4） 的粒子数测量单元（2）的单位流量（Q2）和设定流量 恒定流量单位（CFO3）的速率（Q3）。
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公开(公告)号：US20050119836A1
公开(公告)日：2005-06-02
申请号：US10487282
申请日：2002-08-20
CPC分类号： G01N15/0266 , G01N1/2202 , G01N15/0272 , G01N15/0656 , G01N2001/2223 , G01N2015/0675
摘要： A method and a device for measuring density properies of a particle distribution, in which method a first parameter relating to the particle distribution is measured at a first measuring point (302), at least part of the flow that passed through the first measuring point is guided to the second measuring point (304), a second parameter relating to the particle distribution is measured at a second measuring point (305), and said first and second parameters relating to the particle distribution are used to determine at least one density property of the particle distribution of the original flow (306).
摘要翻译： 一种用于测量颗粒分布的密度属性的方法和装置，其中在第一测量点（302）测量与颗粒分布相关的第一参数，通过第一测量点的流的至少一部分是 被引导到第二测量点（304），在第二测量点（305）处测量与粒子分布相关的第二参数，并且所述与粒子分布相关的第一和第二参数用于确定至少一个密度属性 原始流的粒子分布（306）。
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