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公开(公告)号：US08043515B2
公开(公告)日：2011-10-25
申请号：US12252411
申请日：2008-10-16
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A thin film magnetic head has a configuration in which a main magnetic pole film having a magnetic pole end portion on a medium opposing surface (ABS) side facing a magnetic disk, a write shield film facing the magnetic pole end portion so as to form a recording gap film on the medium opposing surface side, and a thin film coil wound around at least a part of the write shield film are laminated. Further, the thin film magnetic head has an upper yoke magnetic pole film whose size is larger than that of the main magnetic pole film at a part more distant from the ABS than the recording gap film, and this upper yoke magnetic pole film is bonded to the side of the main magnetic pole film close to the thin film coil. In the upper yoke magnetic pole film, an end portion on the ABS side is retracted in a direction apart from the ABS in accordance with an increase in film thickness which is measured from the surface of the main magnetic pole film.
摘要翻译： 薄膜磁头具有这样的结构，其中在与磁盘相对的介质相对表面（ABS）侧上具有磁极端部的主磁极膜，面对磁极端部的写入屏蔽膜以形成 记录间隙膜在介质相对表面侧上，并且缠绕在写保护膜的至少一部分上的薄膜线圈。 此外，薄膜磁头具有比记录间隙膜更远离ABS的部分的尺寸大于主磁极膜的上磁轭磁极膜，并且该上磁轭磁极膜粘合到 主磁极膜的一侧靠近薄膜线圈。 在上磁轭磁极膜中，根据从主磁极膜的表面测量的膜厚度的增加，ABS侧的端部沿与ABS隔离的方向缩回。
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2.发明授权公开(公告)号：US07943288B2
公开(公告)日：2011-05-17
申请号：US12232722
申请日：2008-09-23
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
摘要翻译： 制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，该第一抗蚀剂层51具有对应于非常窄的槽部分的第一狭缝图案51a和对应于从非常窄的槽部分沿着主凹陷的外边缘整体延伸到绝缘体上的临时槽部分的第二狭缝图案51b 第10层; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。
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3.发明申请公开(公告)号：US20090040655A1
公开(公告)日：2009-02-12
申请号：US12232723
申请日：2008-09-23
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
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公开(公告)号：US07463450B2
公开(公告)日：2008-12-09
申请号：US11134477
申请日：2005-05-23
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A thin film magnetic head has a configuration in which a main magnetic pole film having a magnetic pole end portion on a medium opposing surface (ABS) side facing a magnetic disk, a write shield film facing the magnetic pole end portion so as to form a recording gap film on the medium opposing surface side, and a thin film coil wound around at least a part of the write shield film are laminated. Further, the thin film magnetic head has an upper yoke magnetic pole film whose size is larger than that of the main magnetic pole film at a part more distant from the ABS than the recording gap film, and this upper yoke magnetic pole film is bonded to the side of the main magnetic pole film close to the thin film coil. In the upper yoke magnetic pole film, an end portion on the ABS side is retracted in a direction apart from the ABS in accordance with an increase in film thickness which is measured from the surface of the main magnetic pole film.
摘要翻译： 薄膜磁头具有这样的结构，其中在与磁盘相对的介质相对表面（ABS）侧上具有磁极端部的主磁极膜，面对磁极端部的写入屏蔽膜以形成 记录间隙膜在介质相对表面侧上，并且缠绕在写保护膜的至少一部分上的薄膜线圈。 此外，薄膜磁头具有比记录间隙膜更远离ABS的部分的尺寸大于主磁极膜的上磁轭磁极膜，并且该上磁轭磁极膜粘合到 主磁极膜的一侧靠近薄膜线圈。 在上磁轭磁极膜中，根据从主磁极膜的表面测量的膜厚度的增加，ABS侧的端部沿与ABS隔离的方向缩回。
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公开(公告)号：US20060262440A1
公开(公告)日：2006-11-23
申请号：US11134477
申请日：2005-05-23
IPC分类号： G11B5/00
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A thin film magnetic head has a configuration in which a main magnetic pole film having a magnetic pole end portion on a medium opposing surface (ABS) side facing a magnetic disk, a write shield film facing the magnetic pole end portion so as to form a recording gap film on the medium opposing surface side, and a thin film coil wound around at least a part of the write shield film are laminated. Further, the thin film magnetic head has an upper yoke magnetic pole film whose size is larger than that of the main magnetic pole film at a part more distant from the ABS than the recording gap film, and this upper yoke magnetic pole film is bonded to the side of the main magnetic pole film close to the thin film coil. In the upper yoke magnetic pole film, an end portion on the ABS side is retracted in a direction apart from the ABS in accordance with an increase in film thickness which is measured from the surface of the main magnetic pole film.
摘要翻译： 薄膜磁头具有这样的结构，其中在与磁盘相对的介质相对表面（ABS）侧上具有磁极端部的主磁极膜，面对磁极端部的写入屏蔽膜以形成 记录间隙膜在介质相对表面侧上，并且缠绕在写保护膜的至少一部分上的薄膜线圈。 此外，薄膜磁头具有比记录间隙膜更远离ABS的部分的尺寸大于主磁极膜的上磁轭磁极膜，并且该上磁轭磁极膜粘合到 主磁极膜的一侧靠近薄膜线圈。 在上磁轭磁极膜中，根据从主磁极膜的表面测量的膜厚度的增加，ABS侧的端部沿与ABS隔离的方向缩回。
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公开(公告)号：US07721415B2
公开(公告)日：2010-05-25
申请号：US11406268
申请日：2006-04-19
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3123 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.
摘要翻译： 如下制造薄膜磁头。 首先，形成具有凹陷形成为与主磁极层对应的形状的磁极形成凹部的基底绝缘层，形成用于填充磁极形成凹部的用于CMP的停止膜，然后形成磁性层 在停止电影。 接下来，通过在其外侧形成基本上围绕磁极形成凹部的分离槽来分离磁性层，由此分离的磁性层形成有覆盖整个上表面的覆盖绝缘膜。 通过CMP抛光表面，直到停止膜露出，使得残留在磁极形成凹部内侧的磁性层的一部分被用作主磁极层。 此外，形成记录间隙层，写入屏蔽层和薄膜线圈。
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7.发明授权公开(公告)号：US07408740B2
公开(公告)日：2008-08-05
申请号：US11110743
申请日：2005-04-21
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A thin-film magnetic head for perpendicular magnetic recording according to the present invention comprises a coil to generate a magnetic field, and a main pole layer to perform the perpendicular recording using the magnetic field generated by said coil. The lower surface as to the layer-forming direction of said main pole layer has irregularities at the medium-facing surface side end.
摘要翻译： 根据本发明的用于垂直磁记录的薄膜磁头包括产生磁场的线圈和使用由所述线圈产生的磁场执行垂直记录的主极层。 所述主极层的层形成方向的下表面在中间表面侧端部具有凹凸。
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公开(公告)号：US07365942B2
公开(公告)日：2008-04-29
申请号：US11158103
申请日：2005-06-22
CPC分类号： G11B5/1278 , G11B5/11
摘要： A thin-film magnetic head for perpendicular magnetic recording comprises a coil, a main magnetic pole layer for performing perpendicular recording, a write shield layer and a write gap layer, wherein the main magnetic pole layer comprises a main pole film portion and a yoke pole film portion. The write shield layer has a first shield film portion for determining a throat height, and the thickness of the first shield layer is smaller than the thickness of the yoke pole film portion.
摘要翻译： 用于垂直磁记录的薄膜磁头包括线圈，用于执行垂直记录的主磁极层，写屏蔽层和写间隙层，其中主磁极层包括主极膜部分和轭极 胶片部分。 写入屏蔽层具有用于确定喉部高度的第一屏蔽膜部分，并且第一屏蔽层的厚度小于磁轭膜部分的厚度。
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9.发明申请Thin-film magnetic head, method of manufacturing the same, head gimbal assembly and hard disk drive 有权薄膜磁头，制造方法，磁头万向架组件和硬盘驱动器公开(公告)号：US20080002293A1
公开(公告)日：2008-01-03
申请号：US11406268
申请日：2006-04-19
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3123 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.
摘要翻译： 如下制造薄膜磁头。 首先，形成具有凹陷形成为与主磁极层对应的形状的磁极形成凹部的基底绝缘层，形成用于填充磁极形成凹部的用于CMP的停止膜，然后形成磁性层 在停止电影。 接下来，通过在其外侧形成基本上围绕磁极形成凹部的分离槽来分离磁性层，由此分离的磁性层形成有覆盖整个上表面的覆盖绝缘膜。 通过CMP抛光表面，直到停止膜露出，使得残留在磁极形成凹部内侧的磁性层的一部分被用作主磁极层。 此外，形成记录间隙层，写入屏蔽层和薄膜线圈。
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10.发明申请公开(公告)号：US20070014048A1
公开(公告)日：2007-01-18
申请号：US11179728
申请日：2005-07-13
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
摘要翻译： 制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，其设置有对应于非常窄的槽部的第一狭缝图案51a和对应于沿着主凹部的外边缘从非常窄的槽部整体延伸的临时槽部的第二狭缝图案51b， 绝缘层10; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。
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