公开(公告)号：US20120133912A1

公开(公告)日：2012-05-31

申请号：US13364828

申请日：2012-02-02

申请人： Yasufumi NISHII ,  Hiroyuki NAGASAKA ,  Takeshi OKUYAMA

发明人： Yasufumi NISHII ,  Hiroyuki NAGASAKA ,  Takeshi OKUYAMA

IPC分类号： G03B27/52

CPC分类号： G03F7/70341

摘要： A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap interposed therebetween. The liquid recovery system recovers the liquid on a movable object that opposes the first surface of the plate via the liquid recovery part.

摘要翻译： 液体回收系统由浸渍曝光设备使用。 液体回收系统包括：板，其在与第一表面相对的一侧具有第一表面和第二表面; 液体回收部分，其至少一部分与第二表面相对，并且间隔开第一间隙。 液体回收系统通过液体回收部分将液体回收到与板的第一表面相对的可移动物体上。

公开(公告)号：US20110306253A1

公开(公告)日：2011-12-15

申请号：US13152488

申请日：2011-06-03

申请人： Tadashi KUMAMOTO ,  Takeshi OKUYAMA ,  Kazuhiro MIZUKAMI ,  Toshihiro KUSAGAYA

发明人： Tadashi KUMAMOTO ,  Takeshi OKUYAMA ,  Kazuhiro MIZUKAMI ,  Toshihiro KUSAGAYA

IPC分类号： H01R13/46

CPC分类号： H01R13/648 ,  H01R12/7064 ,  H01R13/6594

摘要： An electronic connector includes a connector body which is fixed to a board and to be connected to another connector; a cage which is formed by die-casting a metal and shaped to cover entire side surfaces of the connector body and the other connector; and a pressure cover which includes fixed terminals for fixing the pressure cover to the board, wherein the pressure cover is connected to the cage, and the cage is connected to the board by the fixed terminals of the pressure cover.

摘要翻译： 电子连接器包括固定到板上并连接到另一连接器的连接器体; 笼，其通过压铸金属并成形为覆盖连接器主体和另一连接器的整个侧表面而形成; 以及压盖，其包括用于将压盖固定到板的固定端子，其中压盖与保持架连接，并且保持架通过压盖的固定端连接到板。