OBJECT CHARACTERISTIC MEASUREMENT METHOD AND SYSTEM
    1.
    发明申请
    OBJECT CHARACTERISTIC MEASUREMENT METHOD AND SYSTEM 审中-公开
    对象特征测量方法和系统

    公开(公告)号:US20110122409A1

    公开(公告)日:2011-05-26

    申请号:US12713352

    申请日:2010-02-26

    IPC分类号: G01N21/21

    CPC分类号: G01N21/21

    摘要: The present invention provides a method for measuring object characteristics, wherein the method is capable of overcoming the interference induced bye the phase difference of the background with respect to the measuring system so as to measure the tiny characteristics such as the retardance or azimuth angle of an object accurately. The method is capable of obtaining two sets of light intensity images having retardance of background and the object respectively by simultaneously rotating the retarding elements and analyzer in various rotating angle combinations, and analyzing and calculating upon the polarized light intensities of the images associated with the background and the object so as to obtain actual retardance and azimuth angle of the object without the affect of the background retardance.

    摘要翻译: 本发明提供了一种用于测量物体特性的方法,其中该方法能够克服背景相对于测量系统的相位差引起的干扰,以便测量微小特性,例如延迟或方位角 准确对象。 该方法能够通过以各种旋转角度组合同时旋转延迟元件和分析器来分别获得具有背景延迟和物体的两组光强度图像,并且分析和计算与背景相关联的图像的偏振光强度 以及物体,从而获得物体的实际延迟和方位角,而不影响背景延迟。