公开(公告)号：US20150082580A1

公开(公告)日：2015-03-26

申请号：US14508324

申请日：2014-10-07

Applicant: WaferTech, LLC

Inventor： Guy JACOBSON

IPC: B08B1/04 ,  A46B15/00 ,  A46B13/00

CPC classification number: B08B1/04 ,  A46B13/001 ,  A46B13/003 ,  A46B13/02 ,  A46B15/0053 ,  A46B2200/3013

Abstract: A rotary turbine cleaning device for cleaning semiconductor fabrication equipment works in conjunction with a clean room vacuum or other vacuum or other air pump. The fluid flow created by the vacuum action causes the rotors of the turbine assembly to rotate, thereby rotating the cleaning head. Attached to the cleaning head are bristles or other cleaning media which may dislodge particles from surfaces. The dislodged particles are drawn into the tube through an opening at the end of the tube and the vacuum action. In some embodiments, a lumen delivers a cleaning fluid to the cleaning head.

Abstract translation: 用于清洁半导体制造设备的旋转涡轮机清洁装置与洁净室真空或其他真空或其它空气泵一起工作。 由真空作用产生的流体流动导致涡轮组件的转子旋转，从而旋转清洁头。 附着在清洁头上的是刷毛或其他可能从表面上移除颗粒的清洁介质。 移出的颗粒通过管端部的开口和真空作用被吸入管中。 在一些实施例中，内腔将清洁流体输送到清洁头。

公开(公告)号：US20150079518A1

公开(公告)日：2015-03-19

申请号：US14559526

申请日：2014-12-03

Applicant: WaferTech, LLC

Inventor： Guy JACOBSON

IPC: B01D29/62 ,  G03F7/16

CPC classification number: B01D29/62 ,  B01D29/72 ,  G03F7/16 ,  H01L21/6715

Abstract: An apparatus and method for qualifying a filter used to filter fluid used in a coating operation associated with photolithography or other semiconductor manufacturing processes, provides a semiconductor manufacturing tool that includes a filter and an acoustic wave generator. The filter may be housed inside a filter housing and the acoustic wave generator may produce ultrasonic, megasonic or other acoustic energy. The acoustic wave generator contacts or is in close proximity with the filter housing and provides acoustic wave energy to the filter through the housing. The acoustic wave energy causes any bubbles in the filter to become disengaged.

Abstract translation: 用于对用于与光刻或其他半导体制造工艺相关的涂布操作中使用的流体进行过滤的过滤器的装置和方法提供了包括滤波器和声波发生器的半导体制造工具。 滤波器可以容纳在滤波器壳体内，并且声波发生器可以产生超声波，兆声波或其它声能。 声波发生器与过滤器壳体接触或接近，并通过壳体向过滤器提供声波能量。 声波能量导致过滤器中的任何气泡脱离。