公开(公告)号：US20190388853A1

公开(公告)日：2019-12-26

申请号：US15539732

申请日：2017-04-12

Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY cO., lTD.

Inventor： Ninglin TANG

IPC: B01F7/00 ,  B01F7/18 ,  B01F15/00

Abstract: Involved is the technical field of a stirring device, specifically a stirring device for treatment of photoresist settlement and a photoresist tank. The stirring device includes a sleeve shaft, an inner telescopic shaft, a stirring component, and a rotary rod, wherein, the rotary rod is mounted on an upper end of the sleeve shaft for driving the sleeve shaft to rotate; the stirring component is arranged on a lower end of the sleeve shaft and rotates with the sleeve shaft; and the inner telescopic shaft is arranged inside of the sleeve shaft and connected to the stirring component for controlling opening and closing of the stirring component. Stirring plates approach a bottom portion of the photoresist tank, at which moment manual control is adopted to control stirring of the stirring device upward from the bottom gradually, so as to achieve the objective of homogeneous component of the photoresist. The photoresist is stirred to be more homogeneous. A lot of manpower and material resources are saved. The stirring device enables high stirring speed and high safeness.