公开(公告)号：US20230280560A1

公开(公告)日：2023-09-07

申请号：US18178421

申请日：2023-03-03

Applicant: Verity Instruments, Inc.

Inventor： Larry Bullock ,  Mike Whelan ,  Mark Meloni ,  William Elliott ,  David Friedersdorff

IPC: G02B6/44

CPC classification number: G02B6/4495 ,  G02B6/4471

Abstract: The disclosure provides an improved fiber optic cable assembly that can protect spectrometers against one or more of the external noise and discharge sources. The improved fiber optic cable assembly provides electrical isolation and/or insulation (EII) protection for optical instruments, such as a spectrometer, in which the fiber optic cable assembly is terminated. The EII protection can include one or more of a non-conductive sheathing at least partially covering the termination and the sheathing, a dielectric break providing electrical isolation between the termination and the sheathing, an isolation boot, and a grounding tether. In one example a fiber optical cable assembly includes: (1) a termination, (2) sheathing, and (3) a dielectric break providing electrical isolation between the termination and the sheathing. A fiber optically coupled system having an improved fiber optic cable assembly is also disclosed.

公开(公告)号：US20250118603A1

公开(公告)日：2025-04-10

申请号：US18729439

申请日：2023-10-30

Applicant: Verity Instruments, Inc.

Inventor： Mark Meloni

IPC: H01L21/66 ,  H01J37/32

Abstract: The disclosure recognizes the advantage of improved optical access for spectroscopic monitoring of, for example, semiconductor processing. In one aspect the disclosure provides a gas distributor that can be used within a processing chamber. Unlike conventional gas distributors, the disclosed gas distributor includes one or more optically transmissive sections for improved optical access the chamber. In one example, the gas distributor includes: (1) an opaque section including a first set of gas distribution holes and (2) at least one optically transmissive section coupled to the opaque section and positioned to receive light through a window of the chamber.