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公开(公告)号：US3501638A
公开(公告)日：1970-03-17
申请号：US3501638D
申请日：1967-10-25
Applicant: UNIV ILLINOIS
Inventor： COMPTON WALTER DALE , BLEHA WILLIAM PAUL JR
IPC: H01L27/00 , H01L31/153 , G01T1/16 , H01J39/02
CPC classification number: H01L31/153 , H01L27/00
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