公开(公告)号：US06690455B2

公开(公告)日：2004-02-10

申请号：US09813857

申请日：2001-03-22

Applicant: Tsuyoshi Fujinaka

Inventor： Tsuyoshi Fujinaka

IPC: G01J100

CPC classification number: G03F7/70558 ,  G03F7/70133 ,  G03F7/70716 ,  G03F7/70825 ,  G03F7/70991

Abstract: An illuminance measurement apparatus for measuring the illuminance of illumination light on an image plane of a projection optical system of an exposure apparatus designed to project the image of a pattern from an illuminated mask on a substrate held on a substrate stage by the projection optical system, including an illuminance meter detachably attached to the substrate stage, the illuminance meter having an illuminance detector, a transmitter for wirelessly transmitting a measurement result of the illuminance detector, a storage cell, and a photoelectric converter for converting part of the illumination light photoelectrically and storing it in the storage cell, and a receiver for receiving the wireless signal including the measurement results transmitted by the transmitter.

Abstract translation: 一种照度测量装置，用于测量曝光装置的投影光学系统的图像平面上的照明光，该曝光装置被设计成通过投影光学系统将保持在基板台上的照明掩模上的图案的图像投射到基板台上， 包括可拆卸地附接到基板台的照度计，所述照度计具有照度检测器，用于无线发送照度检测器的测量结果的发送器，存储单元和用于将照明光的一部分光电转换并存储的光电转换器 在存储单元中，以及接收器，用于接收包括由发送器发送的测量结果的无线信号。