公开(公告)号：US20110064198A1

公开(公告)日：2011-03-17

申请号：US12907328

申请日：2010-10-19

申请人： Toshijyu KUNIBE ,  Noriaki Sanada ,  Daisuke Sakai

发明人： Toshijyu KUNIBE ,  Noriaki Sanada ,  Daisuke Sakai

IPC分类号： G01N23/227 ,  G01N23/00

CPC分类号： G01N23/2252 ,  G01N1/32

摘要： The object of the present invention is to analyze a functional organic compound with high accuracy. In the present invention, cluster ions are accelerated so that the kinetic energy of cluster ions is less than 3.1 eV per one atom that makes up the cluster ion and the cluster ions enter a sample. Since the functional organic compound in the sample is etched without the breakdown of the chemical structure, the functional organic compound, which has not been chemically denatured, is exposed on the surface of the sample. By alternately performing the etching and the surface analysis of the sample, or performing the surface analysis of the sample while performing the etching, the sample can be accurately analyzed in the depth direction.

摘要翻译： 本发明的目的是高精度地分析功能性有机化合物。 在本发明中，加速了簇离子，使得簇离子的动能小于每一个构成簇离子原子的3.1eV，簇离子进入样品。 由于样品中的功能性有机化合物在没有化学结构破坏的情况下被蚀刻，所以未被化学变性的功能性有机化合物暴露在样品的表面上。 通过交替地进行样品的蚀刻和表面分析，或者在进行蚀刻时进行样品的表面分析，可以在深度方向上精确地分析样品。