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公开(公告)号：US20210183629A1
公开(公告)日：2021-06-17
申请号：US17117177
申请日：2020-12-10
Applicant: Tokyo Electron Limited
Inventor： Kazuki OSHIMA , Shingo OGUMA
IPC: H01J37/32
Abstract: Provided is a technique capable of adjusting an angle of incidence of ions. Provided is a ring assembly including: a conductive edge ring; an insulating annular member including at least an inner peripheral portion disposed on the edge ring; and a conductive member disposed on at least a portion of an upper surface of the annular member overlapping with the edge ring in top plan view.
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