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公开(公告)号:US20250109988A1
公开(公告)日:2025-04-03
申请号:US18905494
申请日:2024-10-03
Applicant: Thorlabs, Inc.
Inventor: Matthew Singer , Ryan Joseph Priore , Longfei Ye , Erik Baigar
Abstract: A method for fabrication of a chip for surface enhanced Raman spectroscopy (SERS), including: providing a substrate; texturing a surface of the substrate to form a plurality of pillars randomly on the surface until a desired average pillar height, average pillar width and/or pillar density is/are reached; depositing a metal onto the surface of the textured substrate; and thermally annealing the metal such that the metal forms a layer encasing the pillars.