Inspection system and inspection method

    公开(公告)号:US10724960B2

    公开(公告)日:2020-07-28

    申请号:US15129273

    申请日:2015-03-31

    Abstract: An inspection system of an embodiment includes: a planar illumination unit that temporally varies an intensity of light in a periodic manner by spatially moving a stripe pattern of the intensity of light; a time-correlation image generator that generates a time-correlation image with a time-correlation camera or an image capturing system that performs an operation equivalent to that of the time-correlation camera; and a calculation processor that calculates a characteristic from the time-correlation image, the characteristic corresponding to a distribution of normal vectors to an inspection target surface and serving to detect an abnormality based on at least either a difference from a surrounding area or a difference from a reference surface.

    Inspection system and inspection method

    公开(公告)号:US10739272B2

    公开(公告)日:2020-08-11

    申请号:US15300549

    申请日:2015-03-31

    Abstract: An inspection system of an embodiment includes: a planar illumination unit that temporally and spatially varies intensities of light in a periodic manner; a time-correlation image generator that generates a time-correlation image with a time-correlation camera or an image capturing system that performs an operation equivalent to that of the time-correlation camera; and a calculation processor that calculates a characteristic from the time-correlation image, the characteristic corresponding to a distribution of normal vectors to an inspection target surface and serving to detect an abnormality based on at least either a difference from a surrounding area or a difference from a reference surface.

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