摘要:
A method and apparatus are provided that make it possible to speedily measure, and obtain images of, the three-dimensional distribution of electric fields in integrated circuits, using electro-optic sampling. The sampling is performed using a plurality of electric field sensors, each comprising an electro-optic crystal layer, a light-reflecting layer that is in close contact with the electro-optic crystal layer, and a separation layer that is in close contact with the reflection layer, separating the reflection layer from the object to be measured.
摘要:
A moisture detector of closed case type according to a heat capacity method is realized by a relatively simple constitution. The moisture detector includes a first temperature sensor for sensing temperature of a detection target; a second temperature sensor for sensing the temperature of the detection target; a small heater for heating the second temperature sensor; and a processing unit for obtaining information relating to moisture percentage in the detection target on the basis of a signal outputted from the first temperature sensor and a signal outputted from the second temperature sensor heated by the small heater.
摘要:
A moisture detector of closed case type according to a heat capacity method is realized by a relatively simple constitution. The moisture detector includes a first temperature sensor for sensing temperature of a detection target; a second temperature sensor for sensing the temperature of the detection target; a small heater for heating the second temperature sensor; and a processing unit for obtaining information relating to moisture percentage in the detection target on the basis of a signal outputted from the first temperature sensor and a signal outputted from the second temperature sensor heated by the small heater.