Monolithic printhead with self-aligned groove and relative manufacturing process
    1.
    发明申请
    Monolithic printhead with self-aligned groove and relative manufacturing process 失效
    具有自对准凹槽和相关制造工艺的单片打印头

    公开(公告)号:US20040119774A1

    公开(公告)日:2004-06-24

    申请号:US10726516

    申请日:2003-12-04

    Abstract: A monolithic thermal ink jet printhead (40) comprising a groove (45), a plurality of chambers (74) and nozzles (56) is manufactured by means of steps of: (203, 205) partially etching the groove (45) by means of a nulldrynull process and a nullwetnull process; (210) depositing a plurality of sacrificial layers (54); (212) obtaining a plurality of casts (156); (216) completing the etching of the groove (45) by means of an electrochemical process; and (220) removing the casts (156) and the sacrificial layers (54) in such a way as to obtain a plurality of nozzles (56) and chambers (74).

    Abstract translation: 通过以下步骤制造包括凹槽(45),多个室(74)和喷嘴(56)的单片式热喷墨打印头(40):(203,205)通过装置部分蚀刻凹槽(45) 的“干”过程和“湿”过程; (210)沉积多个牺牲层(54); (212)获得多个铸件(156); (216)通过电化学工艺完成凹槽(45)的蚀刻; 和(220)以获得多个喷嘴(56)和室(74)的方式移除铸件(156)和牺牲层(54)。

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