公开(公告)号：US20190072428A1

公开(公告)日：2019-03-07

申请号：US16068445

申请日：2017-01-06

Applicant: Technische Universiteit Eindhoven

Inventor： Andrea Fiore ,  Robertus Willebrordus VAN DER HEIJDEN ,  Leonardo Midolo ,  Zarko Zobenica ,  Tianran Liu

IPC: G01J3/02 ,  G01J3/26 ,  G01J3/42

Abstract: A double membrane microspectrometer is provided that includes a first membrane having a first and second doped semiconductor layers, and a first intrinsic layer is disposed between the first and second layers, where the first intrinsic layer includes an optically absorbing material, a first pattern of through holes are disposed perpendicular through the first membrane having lateral support arms, a second membrane having a third doped layer and a fourth layer is an intrinsic layer or a doped layer, where the second membrane includes a second pattern of through holes, where the first membrane is separated from the second membrane by an insulating bridge layer and is supported above the second membrane by lateral support arms, where an absorption spectrum of the absorbing material is dependent on the separation distance of the membranes, electrodes are disposed on the first layer, the second layer, and the third layer operate the separation.

公开(公告)号：US10732035B2

公开(公告)日：2020-08-04

申请号：US16068445

申请日：2017-01-06

Applicant: Technische Universiteit Eindhoven

Inventor： Andrea Fiore ,  Robertus Willebrordus van der Heijden ,  Leonardo Midolo ,  {hacek over (Z)}arko Zobenica ,  Tianran Liu

IPC: G01J3/42 ,  G01J3/02 ,  G01J3/26 ,  G01J3/12

Abstract: A double membrane microspectrometer is provided that includes a first membrane having a first and second doped semiconductor layers, and a first intrinsic layer is disposed between the first and second layers, where the first intrinsic layer includes an optically absorbing material, a first pattern of through holes are disposed perpendicular through the first membrane having lateral support arms, a second membrane having a third doped layer and a fourth layer is an intrinsic layer or a doped layer, where the second membrane includes a second pattern of through holes, where the first membrane is separated from the second membrane by an insulating bridge layer and is supported above the second membrane by lateral support arms, where an absorption spectrum of the absorbing material is dependent on the separation distance of the membranes, electrodes are disposed on the first layer, the second layer, and the third layer operate the separation.