公开(公告)号：US20250011933A1

公开(公告)日：2025-01-09

申请号：US18547946

申请日：2022-01-28

Applicant: TORAY ENGINEERING CO., LTD.

Inventor： Naoto SUGANUMA ,  Toyoharu TERADA ,  Motohiro YAMAHARA ,  Kazuyuki NOBORIO ,  Koshi TAGUCHI

IPC: C23C16/50 ,  B01J19/08 ,  C23C16/448 ,  C23C16/455 ,  C23C16/458 ,  C23C16/52 ,  H01J37/32

Abstract: A laminate manufacturing apparatus comprises a vacuum chamber, a gas introduction port, and a plasma generator. The laminate manufacturing apparatus has a surface hydrophilization mode in which a film formation surface of a substrate is modified by a plasma atmosphere in a state in which an evaporation source that imparts a hydrophilic group is supplied into the vacuum chamber, thereby rendering the film formation surface hydrophilic, and a self-assembling mode in which an evaporation source of a precursor material of a self-assembled monolayer is supplied to the substrate on which the film formation surface has been hydrophilized, in a state in which an evaporation source that promotes hydrolysis of the precursor material of the self-assembled monolayer has been supplied while an inside of the vacuum chamber is under a vacuum, thereby forming the self-assembled monolayer on the hydrophilized film formation surface.