公开(公告)号：US20190204587A1

公开(公告)日：2019-07-04

申请号：US16226420

申请日：2018-12-19

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Robert F. PAYNE ,  Molly Nelis SING

IPC: G02B26/08 ,  G01B7/30

CPC classification number: G02B26/0841 ,  G01B7/30

Abstract: A digital micromirror device includes a plurality of micromirror cells on a semiconductor die. Each respective cell includes a memory circuit and an electrode selection circuit. At least some of the micromirror cells include a micromirror and each respective memory circuit controls a micromirror tilt angle. For a given memory circuit controlled to a first tilt angle, a measurement circuit measures a first value indicative of a capacitance between a first electrode and the micromirror and measures a second value indicative of a capacitance on the second electrode. For a second micromirror tilt angle, the measurement circuit measures a third value indicative of a capacitance between the first electrode and the micromirror and measures a fourth value indicative of a capacitance on the second electrode. The measurement circuit generates a signal indicative of whether the micromirror is stuck at a particular angle or missing.