Defect inspection device
    2.
    发明授权

    公开(公告)号:US10811652B2

    公开(公告)日:2020-10-20

    申请号:US15825264

    申请日:2017-11-29

    摘要: To carry out accurate defect inspection over a wide area, a defect inspection device (1) includes: a radiation source section (2) configured to emit an electromagnetic wave (4) to a separator roll (10); and a sensor section (3) configured to detect the electromagnetic wave (4) that the radiation source section (2) has emitted to the separator roll (10), the sensor section (3) being configured to detect the electromagnetic wave (4) before and after the separator roll is moved relative to the radiation source section (2).