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公开(公告)号：US10060791B2
公开(公告)日：2018-08-28
申请号：US15623961
申请日：2017-06-15
Applicant: Si-Ware Systems
Inventor： Yasser M. Sabry , Diaa Abdel Maged Khalil , Mostafa Medhat , Hisham Haddara , Bassam Saadany , Khaled Hassan
CPC classification number: G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0256 , G01J3/0259 , G01J3/0291 , G01J3/26 , G01J3/45 , G01J3/4532
Abstract: Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
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公开(公告)号：US11085825B2
公开(公告)日：2021-08-10
申请号：US16368771
申请日：2019-03-28
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Mohamed Hossam , Momen Anwar , Ahmed Shebl , Hisham Haddara , Bassam A. Saadany
Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.
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公开(公告)号：US20190301939A1
公开(公告)日：2019-10-03
申请号：US16368771
申请日：2019-03-28
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Mohamed Hossam , Momen Anwar , Ahmed Shebl , Hisham Haddara , Bassam A. Saadany
Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.
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公开(公告)号：US20170363469A1
公开(公告)日：2017-12-21
申请号：US15623961
申请日：2017-06-15
Applicant: Si-Ware Systems
Inventor： Yasser M. Sabry , Diaa Abdel Maged Khalil , Mostafa Medhat , Hisham Haddara , Bassam Saadany , Khaled Hassan
CPC classification number: G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0256 , G01J3/0259 , G01J3/0291 , G01J3/26 , G01J3/45 , G01J3/4532
Abstract: Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
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