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1.发明授权公开(公告)号：US09385298B2
公开(公告)日：2016-07-05
申请号：US14867350
申请日：2015-09-28
IPC分类号： B41J2/045 , H01L41/08 , H01L41/18 , B41J2/14 , H01L41/083
CPC分类号： B41J2/14233 , B41J2/14201 , B41J2/14274 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2202/03 , H01L41/08 , H01L41/0815 , H01L41/083 , H01L41/0831 , H01L41/0973 , H01L41/1876 , H01L41/318
摘要： An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2θ at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by θ-2θ measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.
摘要翻译： 机电转换元件包括直接或间接地形成在基板或基膜上的下电极; 一种机电转换膜，形成在下电极上并且包括具有优先取向为{n00}面的钙钛矿晶体结构的压电体，其中n为正整数; 以及形成在机电转换膜上的上电极。 位置2处的衍射峰; 其中衍射强度具有最大值并且对应于（X00）面或（00X）面，X为1或2，由＆thetas获得; -2＆thetas; X射线衍射测量中的测量显示梯形峰形，并具有两个或多个弯曲点。
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2.发明授权公开(公告)号：US08960867B2
公开(公告)日：2015-02-24
申请号：US13848243
申请日：2013-03-21
IPC分类号： B41J2/045 , H01L41/00 , H02N2/00 , H01L41/08 , H01L41/09 , H01L41/047 , H01L41/29 , H01L41/318 , B41J2/14 , B41J2/16
CPC分类号： H01L41/0805 , B41J2/045 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/0478 , H01L41/0815 , H01L41/0973 , H01L41/29 , H01L41/318
摘要： An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, includes a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated; an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; and a top electrode disposed on the electromechanical conversion film, wherein the metal film is solid.
摘要翻译： 一种用于将电信号转换为机械位移或将机械位移转换为电信号的机电转换元件包括：底电极，其中氧化铝膜，金属膜和导电氧化膜依次层叠; 设置在底电极的导电氧化膜上的机电转换膜; 以及设置在所述机电转换膜上的顶部电极，其中所述金属膜是固体的。
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公开(公告)号：US20120206545A1
公开(公告)日：2012-08-16
申请号：US13365352
申请日：2012-02-03
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491
摘要： Disclosed is an inkjet head that includes individual liquid chambers having liquid droplet discharging holes; an oscillation plate; piezoelectric elements formed by laminating a lower electrode, a piezoelectric material, and upper electrodes on the oscillation plate, wherein the lower electrode is a common electrode and the upper electrode is an individual electrode; a common electrode wiring connected to the lower electrode;and individual electrode wirings connected to the corresponding upper electrodes of the piezoelectric elements, wherein driving signals are individually input to the corresponding individual electrode wirings. The inkjet head further includes an upper layer insulator film; an intermediate layer insulator film; and a lower layer insulator film. The intermediate layer insulator film and the upper layer insulator film have openings for exposing the piezoelectric elements.
摘要翻译： 公开了一种喷墨头，其包括具有液滴排出孔的各个液室; 振荡板; 通过在振荡板上层叠下电极，压电材料和上电极而形成的压电元件，其中下电极是公共电极，上电极是单独电极; 连接到下电极的公共电极布线; 以及连接到压电元件的相应上电极的单独电极配线，其中驱动信号被单独输入到相应的单独电极布线。 喷墨头还包括上层绝缘膜; 中间层绝缘膜; 和下层绝缘膜。 中间层绝缘膜和上层绝缘膜具有用于使压电元件露出的开口。
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4.发明授权Inkjet head, inkjet recording apparatus, liquid droplet ejecting apparatus, and image forming apparatus 有权喷墨头，喷墨记录装置，液滴喷射装置和图像形成装置公开(公告)号：US08454133B2
公开(公告)日：2013-06-04
申请号：US13422136
申请日：2012-03-16
IPC分类号： B41J2/045
CPC分类号： B41J2/1612 , B41J2/14274 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14491
摘要： An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.
摘要翻译： 公开了一种喷墨头。 在喷墨头中，在多个专用液体室对准的液体室基板上形成振动板; 在专用电极布线和下电极重叠的区域中，在专用电极布线和下电极之间形成第一绝缘膜和第二绝缘膜; 在包括专用电极布线的形成区域的区域中堆叠第三绝缘膜和第四绝缘膜; 在专用液体室的形成区域的至少一部分中，设置有非成膜区域; 并且在包括压电元件形成部的区域中，在非成膜区域中形成第一绝缘膜和第四绝缘膜，或者在非成膜区域中形成第四绝缘膜。
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公开(公告)号：US10723130B2
公开(公告)日：2020-07-28
申请号：US16212933
申请日：2018-12-07
申请人： Takahiko Kuroda , Satoshi Mizukami
发明人： Takahiko Kuroda , Satoshi Mizukami
摘要： A liquid discharge head includes a head substrate and a surface treatment film on a surface of the head substrate. The surface treatment film is an oxide film containing Si. The oxide film contains a transition metal to form a passive film. A content of Si in a vicinity of an interface of the surface treatment film with the head substrate is higher than a content of Si in an inside of the surface treatment film and is 20 at % or more.
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公开(公告)号：US20190176469A1
公开(公告)日：2019-06-13
申请号：US16212933
申请日：2018-12-07
申请人： Takahiko Kuroda , Satoshi Mizukami
发明人： Takahiko Kuroda , Satoshi Mizukami
CPC分类号： B41J2/1433 , B41J2/1606 , B41J2/161 , B41J2/162 , B41J2/1623 , B41J2/1642
摘要： A liquid discharge head includes a head substrate and a surface treatment film on a surface of the head substrate. The surface treatment film is an oxide film containing Si. The oxide film contains a transition metal to form a passive film. A content of Si in a vicinity of an interface of the surface treatment film with the head substrate is higher than a content of Si in an inside of the surface treatment film and is 20 at % or more.
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公开(公告)号：US08919926B2
公开(公告)日：2014-12-30
申请号：US13408073
申请日：2012-02-29
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/14491
摘要： A disclosed inkjet head includes a liquid chamber formed by a space between a vibrating plate and a nozzle substrate and separated by partitions; a piezoelectric element formed by sequentially laminating a common electrode, a piezoelectric substance and an individual electrode over the space; first to fourth insulating films respectively having first to fourth openings; and a first wiring connected to the individual electrode and pulled through the first and second openings over the common electrode, wherein the first wiring passes through the third opening over the third insulating film, the first wiring is exposed from the fourth opening so as to be externally connected, and the third insulating film and the fourth insulating film are not partly formed above the liquid chamber and formed above the first wiring.
摘要翻译： 所公开的喷墨头包括由振动板和喷嘴基板之间的空间形成并由分隔件分隔的液体室; 通过在该空间上依次层叠公共电极，压电体和单个电极而形成的压电元件; 分别具有第一至第四开口的第一至第四绝缘膜; 以及第一布线，其连接到所述单独电极并且在所述公共电极上被拉动通过所述第一和第二开口，其中所述第一布线穿过所述第三绝缘膜上的所述第三开口，所述第一布线从所述第四开口露出， 外部连接，并且第三绝缘膜和第四绝缘膜不部分地形成在液体室的上方并形成在第一布线的上方。
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公开(公告)号：US10926540B2
公开(公告)日：2021-02-23
申请号：US16524356
申请日：2019-07-29
申请人： Satoshi Mizukami , Takahiko Kuroda
发明人： Satoshi Mizukami , Takahiko Kuroda
摘要： A liquid discharge head includes a channel forming member made of silicon, the channel forming member including a plurality of liquid channels, a natural oxide film having a film thickness of 2 nm or more on an outermost surface of the plurality of liquid channels of the channel forming member, and a surface treatment film on the natural oxide film to contact the natural oxide film. Each of a carbon content and a fluorine content in an interface between the natural oxide film and the surface treatment film is 5 atomic % or less.
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公开(公告)号：US08777382B2
公开(公告)日：2014-07-15
申请号：US13365352
申请日：2012-02-03
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491
摘要： Disclosed is an inkjet head that includes individual liquid chambers having liquid droplet discharging holes; an oscillation plate; piezoelectric elements formed by laminating a lower electrode, a piezoelectric material, and upper electrodes on the oscillation plate, wherein the lower electrode is a common electrode and the upper electrode is an individual electrode; a common electrode wiring connected to the lower electrode; and individual electrode wirings connected to the corresponding upper electrodes of the piezoelectric elements, wherein driving signals are individually input to the corresponding individual electrode wirings. The inkjet head further includes an upper layer insulator film; an intermediate layer insulator film; and a lower layer insulator film. The intermediate layer insulator film and the upper layer insulator film have openings for exposing the piezoelectric elements.
摘要翻译： 公开了一种喷墨头，其包括具有液滴排出孔的各个液室; 振荡板; 通过在振荡板上层叠下电极，压电材料和上电极而形成的压电元件，其中下电极是公共电极，上电极是单独电极; 连接到下电极的公共电极布线; 以及连接到压电元件的相应上电极的单独电极配线，其中驱动信号被单独输入到相应的单独电极布线。 喷墨头还包括上层绝缘膜; 中间层绝缘膜; 和下层绝缘膜。 中间层绝缘膜和上层绝缘膜具有用于使压电元件露出的开口。
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公开(公告)号：US20120212545A1
公开(公告)日：2012-08-23
申请号：US13396830
申请日：2012-02-15
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14491 , B41J2202/08
摘要： An ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.
摘要翻译： 喷墨头包括具有喷嘴的喷嘴板，喷嘴板上的振动板，由分隔壁隔开的空间形成的液体室，具有公共电极的压电元件，压电体和单独的电极，按此顺序分层 所述振动板的表面，具有第一开口的第一绝缘膜和在所述第一表面上依次层叠的第二开口的第二绝缘膜，经由所述第一开口和所述第二开口从所述单独电极拉出的第一电线， 第三绝缘膜，在第一导线上具有第三开口; 以及经由所述第三开口拉出的第二导线，其中所述第三绝缘体膜形成在所述第二绝缘膜的第一区域中，并且不形成在除了在所述液体室之上形成的所述第一线的区域之外的第二区域中。
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