MEASUREMENT OPTICAL SYSTEM FOR METROLOGY INSPECTION AND METHOD OF MEASURING OVERLAY USING THE SAME

    公开(公告)号:US20250085642A1

    公开(公告)日:2025-03-13

    申请号:US18882312

    申请日:2024-09-11

    Abstract: A measurement optical system and an overlay measurement method using the same are provided. The measurement optical system includes: a light source configured to emit infrared light; a light splitter configured to reflect, from the light source and to a subject, a first portion of the infrared light incident to the light splitter; a photodetector on a same optical axis as the light splitter and configured to receive a second portion of the infrared light reflected from the subject; a first lens optical system between the light splitter and the photodetector; and a second lens optical system between the first lens optical system and the photodetector, wherein the subject may include an alignment key on which a meta key is provided.

    ZOOMABLE IMAGE SENSOR AND IMAGE SENSING METHOD

    公开(公告)号:US20240022818A1

    公开(公告)日:2024-01-18

    申请号:US18477214

    申请日:2023-09-28

    CPC classification number: H04N23/69 H04N23/55 H04N23/80

    Abstract: An image sensor includes a plurality of lens elements, each lens element of the plurality of lens elements including a plurality of scatterers arranged to concentrate light incident on the image sensor; and a sensing element configured to sense light passing through the plurality of lens elements, wherein one lens element of the plurality of lens elements has a first focal length that is different from a second focal length of another lens element of the plurality of lens elements and is separated from the sensing element by the first focal length.

    IMAGING DEVICE AND IMAGE SENSING METHOD

    公开(公告)号:US20230033326A1

    公开(公告)日:2023-02-02

    申请号:US17966678

    申请日:2022-10-14

    Abstract: Provided is an imaging device including a sensing array including a plurality of sensing elements, an imaging lens array including a plurality of imaging optical lenses, each of the plurality of imaging optical lenses having a non-circular cross-section perpendicular to an optical axis, and configured to transmit light received from an outside of the imaging device, and a condensing lens array including a plurality of condensing lenses disposed between the imaging lens array and the sensing array, and configured to transmit the light passing through the imaging lens array to the sensing elements, wherein a number of the plurality of imaging optical lenses is less than a number of the plurality of condensing lenses.

    THREE-DIMENSIONAL DISPLAY APPARATUS
    9.
    发明申请

    公开(公告)号:US20180152687A1

    公开(公告)日:2018-05-31

    申请号:US15639243

    申请日:2017-06-30

    Abstract: A three-dimensional (3D) display apparatus is provided. The 3D display apparatus includes a display panel configured to output pixel values that respectively correspond to a preset number of viewpoints, and an optical layer that is provided in front of or behind the display panel and that is configured to adjust directions of rays output from the display panel or to provide light to the display panel so that the rays diverge.

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