公开(公告)号：US20170363418A1

公开(公告)日：2017-12-21

申请号：US15464896

申请日：2017-03-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung Yoon RYU ,  Younghoon SOHN ,  Yusin YANG ,  Chungsam JUN ,  Yunjung JEE

IPC: G01B11/06

CPC classification number: G01B11/06 ,  G01B9/02001 ,  G01B9/02021 ,  G01B11/0616 ,  G01B11/0625 ,  G01B11/0675 ,  G01B2210/56

Abstract: Disclosed are apparatuses and methods for measuring a thickness. The apparatus for measuring a thickness including a light source that emits a femto-second laser, an optical coupler through which a portion of the femto-second laser is incident onto a target and other portion of the femto-second laser is incident onto a reference mirror, a detector configured to receive a reflection signal reflected on the reference mirror and a sample signal generated from the target and configured to measure a thickness of the target based on an interference signal between the reflection signal and the sample signal, and a plurality of optical fiber lines configured to connect the light source, the optical coupler, and the detector to each other may be provided.