公开(公告)号：US10892175B2

公开(公告)日：2021-01-12

申请号：US16046983

申请日：2018-07-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Rodolfo Martinez ,  Robert Bell ,  Robert Stebbins

IPC: H01L21/67 ,  H01L21/687 ,  F16M11/16 ,  H05B6/10 ,  F16M11/42

Abstract: A stand for a heater pedestal with a base member and a support member detachably coupled to the base member, the support member having a plurality of ring members and at least one spacer member extending vertically from the base member, a ring member separated from another ring member by a spacer member, a ring member having an aperture which extends through the ring member in a horizontal direction, the at least one spacer member forming at least one opening between two corresponding ring members, and the ring member furthest from the base member configured to support a heater pedestal, and the apertures of the ring members of the support member being configured to receive a susceptor of the heater pedestal.