公开(公告)号：US20170047371A1

公开(公告)日：2017-02-16

申请号：US15090883

申请日：2016-04-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seokha LEE ,  Kyungah JEON ,  Yunki LEE

IPC: H01L27/146

CPC classification number: H01L27/14643 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/1463 ,  H01L27/1464 ,  H01L27/14689

Abstract: An image sensor includes a substrate including a plurality of photoelectric conversion parts and a pixel isolation trench extending from a surface of the substrate between the photoelectric conversion parts, a first fixed charge film directly on the surface of the substrate, a second fixed charge film directly on the first fixed charge film and an inner wall of the pixel isolation trench, and an insulating layer directly on the second fixed charge film, the insulating layer configured to fill the pixel isolation trench.

Abstract translation: 图像传感器包括：基板，包括多个光电转换部分和从光电转换部分之间的基板表面延伸的像素隔离沟槽，直接在基板表面上的第一固定电荷膜， 在所述第一固定电荷膜和所述像素隔离沟槽的内壁以及直接位于所述第二固定电荷膜上的绝缘层，所述绝缘层被配置为填充所述像素隔离沟槽。