SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20250159871A1

    公开(公告)日:2025-05-15

    申请号:US18664850

    申请日:2024-05-15

    Abstract: A semiconductor memory device may include a substrate including a cell region, a peripheral region, and a boundary region therebetween, a plurality of gate electrodes extending in a first direction within the substrate of the cell region, a plurality of bit lines extending in a second direction crossing the first direction on the substrate of the cell region and the boundary region, a plurality of buried contacts connected to the substrate of the cell region and between the gate electrodes and between the bit lines on the substrate of the cell region, a dummy buried contact between the bit lines on the substrate of the boundary region, and a bit line contact connected to at least one of the bit lines on the substrate of the boundary region, wherein the dummy buried contact includes an insulating material.

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