公开(公告)号：US20230339071A1

公开(公告)日：2023-10-26

申请号：US17977018

申请日：2022-10-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junghyun ROH ,  Jongguw KIM ,  Wangsun LIM ,  Manhee HAN ,  Jaeyoung HONG

IPC: B24B53/00 ,  B24B53/017 ,  H01L21/304

CPC classification number: B24B53/005 ,  B24B53/017 ,  H01L21/304

Abstract: A grinding apparatus and a method for manufacturing a semiconductor device using the same are provided. A griding apparatus includes a chuck unit configured to receive a substrate, a grinding unit on a part of the chuck unit and configured to grind the substrate, and a dressing unit under a part of the grinding unit adjacent to the chuck unit and including a dressing board configured to dress the grinding unit and magnets under the dressing board.