公开(公告)号：US20250025981A1

公开(公告)日：2025-01-23

申请号：US18647240

申请日：2024-04-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hojoon Lee ,  Jinuk Byun ,  Joongsuk Oh ,  Seongryeol Kim ,  Younggu Kim ,  Seunghoon Choi ,  Jaemyung Choe

IPC: B24B37/005

Abstract: The present disclosure relates to devices, methods, and systems for transforming measurement data. An example device for transforming measurement data includes a communicator configured to receive first measurement data, the first measurement data including step height values on a semiconductor chip with a chemical mechanical polishing (CMP) process performed thereon, and to receive layout data comprising a layout included in the semiconductor chip, and a processor configured to, based on the layout data, transform the first measurement data to second measurement data, the second measurement data including step height values of the semiconductor chip with a metal deposited thereon.

公开(公告)号：US20240028910A1

公开(公告)日：2024-01-25

申请号：US18171550

申请日：2023-02-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yunjun Nam ,  Bogyeong Kang ,  Hyowon Moon ,  Byungseon Choi ,  Jaemyung Choe ,  Hyunjae Jang ,  In Huh

IPC: G06N3/10 ,  G06N3/08 ,  G06F30/3308

CPC classification number: G06N3/10 ,  G06N3/08 ,  G06F30/3308

Abstract: In a modeling method of a neural network, a first regression model is trained based on first sample data and first simulation result data. The first regression model is used to predict the first simulation result data from the first sample data. The first sample data represent at least one of conditions of a manufacturing process of a semiconductor device and characteristics of the semiconductor device. The first simulation result data are obtained by performing a simulation on the first sample data. In response to a consistency of the first regression model being lower than a target consistency, the first regression model is re-trained based on second sample data different from the first sample data. The second sample data are associated with a consistency reduction factor of the first regression model that is responsible for a prediction failure of the first regression model.

公开(公告)号：US20240320402A1

公开(公告)日：2024-09-26

申请号：US18544065

申请日：2023-12-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangjune Bae ,  Taeyoon An ,  Joohyung You ,  In Huh ,  Moonhyun Cha ,  Jaemyung Choe

IPC: G06F30/27

CPC classification number: G06F30/27

Abstract: Provided are a method, a device, and a system for estimating threshold values of a kernel density function with respect to defects of a product. The method includes a bootstrapping sampling operation, estimating optimal kernel bandwidths for sample data sets by using a bandwidth estimation method selected according to a number of sample data from among a plurality of bandwidth estimation methods, estimating threshold values corresponding to a tail region of the kernel density function based on the optimal kernel bandwidths, and providing a quantitative value for quantifying uncertainty of the threshold values based on the plurality of threshold values.