公开(公告)号：US20250072106A1

公开(公告)日：2025-02-27

申请号：US18435305

申请日：2024-02-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jisoo PARK ,  Byungju KANG ,  Jaehyoung LIM ,  Kwanyoung CHUN ,  Subin CHOI

IPC: H01L27/092 ,  H01L21/822 ,  H01L21/8238 ,  H01L23/528 ,  H01L29/06 ,  H01L29/417 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775

Abstract: A three-dimensional semiconductor device may include a back-side metal layer, a lower channel pattern on the back-side metal layer, first and second lower source/drain patterns, which are spaced apart from each other in a first direction with the lower channel pattern interposed therebetween, the first lower source/drain pattern being connected to the lower channel pattern, an upper channel pattern on the lower channel pattern, a first upper source/drain pattern on the first lower source/drain pattern, the first upper source/drain pattern being connected to the upper channel pattern, a second upper source/drain pattern on the second lower source/drain pattern, and a wide via electrically connecting the first upper source/drain pattern to the second lower source/drain pattern. The wide via may include first and second via portions having first and second top surfaces, and here, the second top surface may be located at a level lower than the first top surface.

公开(公告)号：US20240258437A1

公开(公告)日：2024-08-01

申请号：US18510146

申请日：2023-11-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jisoo PARK ,  Donghoon HWANG ,  Inchan HWANG ,  Hyojin KIM ,  Jaehyoung LIM

IPC: H01L29/786 ,  H01L29/06 ,  H01L29/423 ,  H01L29/775

CPC classification number: H01L29/78696 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/775

Abstract: A 3D stacked FET may include a back-side wiring layer including a first back-side power line and a second back-side power line, a first FET on the back-side wiring layer, a second FET over the first FET, a front-side wiring layer over the second FET, a first through-electrode connecting the first FET to the second FET, and a second through-electrode connecting the front-side and back-side power lines. The front-side wiring layer may extend in a first direction and may include a front-side power line connected to the second back-side power line. The first FET and the second FET may share a gate extending in a second direction. Each of the first FET and the second FET may include a source and a drain respectively on both sides of the gate in the first direction, and a channel between the source and the drain and surrounded by the gate.