公开(公告)号：US20190259641A1

公开(公告)日：2019-08-22

申请号：US16115943

申请日：2018-08-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-Hoo KIM ,  Sung Hyun PARK ,  Hyun Woo NHO ,  Ji Hoon CHA ,  Yong Jun CHOI

IPC: H01L21/67 ,  B01D29/66 ,  H01L21/311

Abstract: A liquid chemical recycle system includes a buffer tank receiving a first liquid chemical from outside; a vacuum tank having a vacuum pump connected thereto and receiving the first liquid chemical from the buffer tank using the vacuum pump; and a recycle tank receiving the first liquid chemical from the vacuum tank and providing a second liquid chemical, which is a recycled first liquid chemical, to the outside, wherein the buffer tank includes a first injection portion, to which the first liquid chemical is provided, and a first supply portion, which provides the first liquid chemical to the vacuum tank, and a bottom of the buffer tank is downwardly inclined toward the first supply portion to prevent a material contained in the first liquid chemical from being accumulated in the buffer tank.