公开(公告)号：US20190228996A1

公开(公告)日：2019-07-25

申请号：US16181570

申请日：2018-11-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seong-Chan HAN ,  Young-Rock LEE ,  Han-Ju KIM ,  Hun HAN

IPC: H01L21/67 ,  H01L21/56 ,  H01L23/00

Abstract: A dispenser includes a syringe container having a first end and a second end, the syringe container having a length direction extending between the first end and the second end, a plunger movable within the syringe container along the length direction of the syringe container and configured to be positioned on a surface of an underfill solution to be received within the syringe container at a first region between the plunger and the second end, a cap attached airtightly to the first end of the syringe container, a first gas supply line configured to supply a first gas into the syringe container through the cap, and a second gas supply line extending from the cap to the plunger, the second gas supply line being in fluid communication with the first region and configured to supply a second gas into the underfill solution to be received within the syringe container at the first region through a through hole of the plunger.