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公开(公告)号：US20220404197A1
公开(公告)日：2022-12-22
申请号：US17827051
申请日：2022-05-27
Applicant: Samsung Electronics Co., Ltd.
Inventor： Hidaka YASUHIRO , Jinyong KIM
Abstract: A spectrometer and a metrology system capable of improving spectral performance are provided. The spectrometer includes a collimator lens, a focusing lens, and a spatial light modulator (SLM), wherein light reflected by the SLM is output from an output slit through the focusing lens and a dispersive optical element, and on a second plane perpendicular to a first plane including optical paths of pieces of light dispersed at different angles, an incident slit, the output slit, and a reflective plane have a conjugate relationship.
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