SEMICONDUCTOR DEVICE
    1.
    发明申请

    公开(公告)号:US20220037235A1

    公开(公告)日:2022-02-03

    申请号:US17185166

    申请日:2021-02-25

    Abstract: A semiconductor device may include a substrate including a first surface and a second surface, which are opposite to each other, an insulating layer on the first surface of the substrate, a first via structure and a second via structure penetrating the substrate and a portion of the insulating layer and having different widths from each other in a direction parallel to the first surface of the substrate, metal lines provided in the insulating layer, and an integrated circuit provided on the first surface of the substrate. A bottom surface of the first via structure may be located at a level lower than a bottom surface of the second via structure, when measured from the first surface of the substrate. The second via structure may be electrically connected to the integrated circuit through the metal lines.

    SEMICONDUCTOR DEVICE INCLUDING THROUGH ELECTRODE AND SEMICONDUCTOR PACKAGE INCLUDING THE SAME

    公开(公告)号:US20220367321A1

    公开(公告)日:2022-11-17

    申请号:US17713421

    申请日:2022-04-05

    Abstract: A semiconductor device includes front and back side structures on first and second surfaces of a substrate, respectively, and first and second through electrodes penetrating the substrate. The front side structure includes a circuit device, a first front side conductive pattern at a first level, a second front side conductive pattern at a second level, a lower insulating structure, and first to third insulating structures. The back side structure includes a first and a second back side conductive pattern on the same level. The first through electrode contacts the first back side conductive pattern and the first front side conductive pattern. The second through electrode contacts the second back side conductive pattern and the second front side conductive pattern. The first front side conductive pattern penetrates the second insulating structure and at least a portion of the third insulating structure.

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