HYBRID VERTICAL CAVITY LASER AND METHOD OF MANUFACTURING THE SAME
    1.
    发明申请
    HYBRID VERTICAL CAVITY LASER AND METHOD OF MANUFACTURING THE SAME 有权
    混合垂直孔激光器及其制造方法

    公开(公告)号:US20140269803A1

    公开(公告)日:2014-09-18

    申请号:US13975499

    申请日:2013-08-26

    Abstract: A hybrid vertical cavity laser includes an optical circuit substrate including a grating having refractive index units having a lower refractive index and a higher refractive index with respect to each other that are alternately arranged in a first direction, and a waveguide guiding light in the first direction, a mesa structure on the optical circuit substrate, the mesa structure including a first-type semiconductor layer including an exposed portion, an active layer, a second-type semiconductor layer, and an upper reflective layer sequentially stacked in a second direction perpendicular to the first direction, a first electrode on the exposed portion, and a second electrode on the upper reflective layer. An overlapped length between the waveguide and a mesa aperture forming an opening through which light produced from the active layer enters the grating is D, a pitch of the grating is p, and 0

    Abstract translation: 混合垂直腔激光器包括光电路衬底,该光电路衬底包括具有折射率单位的折射率单位的光栅,所述折射率单元相对于彼此交替排列在第一方向上的折射率较低和折射率较高;以及波导, 在所述光电路基板上的台面结构,所述台面结构包括包括暴露部分,有源层,第二类型半导体层和上反射层的第一类型半导体层,所述第一类型半导体层顺序地沿垂直于 第一方向,暴露部分上的第一电极和上反射层上的第二电极。 波导和台面孔之间的重叠长度形成开口,通过该开口,从有源层产生的光进入光栅是D,光栅的间距为p,且0

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