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公开(公告)号:US20240322048A1
公开(公告)日:2024-09-26
申请号:US18606081
申请日:2024-03-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyunghwan LEE , Jeonil LEE , Minhee CHO , Daweon HA
IPC: H01L29/792 , H10B12/00
CPC classification number: H01L29/7926 , H10B12/482 , H10B12/485 , H10B12/488
Abstract: Provided is an integrated circuit device including a source line extending in a first horizontal direction on a substrate, a channel layer extending in a vertical direction, disposed on the source line, and having a first sidewall and a second sidewall, a trapping layer on the first sidewall of the channel layer and including an oxide semiconductor, a word line on at least one sidewall of the trapping layer and extending in a second horizontal direction crossing the first horizontal direction, a gate insulation layer between the at least one sidewall of the trapping layer and the word line, and a bit line electrically connected to the channel layer and extending in the first horizontal direction, wherein the channel layer has a first bandgap energy, and the trapping layer has a second bandgap energy that is greater than the first bandgap energy.