公开(公告)号：US20250155810A1

公开(公告)日：2025-05-15

申请号：US18929891

申请日：2024-10-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiyup KIM ,  Beomgoo KANG ,  Songse YI ,  Dabin KIM ,  Woojae JANG

IPC: G03F7/039 ,  C08F212/14 ,  G03F7/00 ,  G03F7/20 ,  H01L21/027

Abstract: A photosensitive polymer may include repeating units represented by Formula 1 and may have a polydispersity index (PDI) of 1.1 or less.
In Formula 1, R1, R2, R3, R4, R5, R6, R7, and R8 each independently may be a hydrogen atom, a C1-C3 linear or branched alkyl group, a substituted or unsubstituted C2-C3 linear or branched alkenyl group, a substituted or unsubstituted C2-C3 linear or branched alkynyl group, a substituted or unsubstituted C1-C3 alkoxy group, or a halogen element; A may be an acid-labile group having an acid desorption rate lower than that of a trialkylsilyl group; and m and n each may be an integer of 1 or more.