公开(公告)号：US20240209489A1

公开(公告)日：2024-06-27

申请号：US18457386

申请日：2023-08-29

Applicant: Samsung Display Co., Ltd. ,  Olum Material Corporation

Inventor： HONG-KYUN AHN ,  ByoungIl LEE ,  Taekyong JANG ,  JUNGWOO KO ,  SEUNGJIN LEE

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A mask includes a mask frame having an opening, an open mask disposed on the mask frame, the open mask having a first opening, the first opening disposed in the opening in case that viewed in a plan view, and a cell mask disposed on the open mask and having a second opening, the second opening being smaller than the first opening.