公开(公告)号：US11287749B2

公开(公告)日：2022-03-29

申请号：US17198469

申请日：2021-03-11

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Youngho Park ,  Seungyong Song ,  Youngchul Lee ,  Youngsuck Choi

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US11807932B2

公开(公告)日：2023-11-07

申请号：US17197300

申请日：2021-03-10

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Youngho Park ,  Seungyong Song ,  Youngchul Lee ,  Youngsuck Choi

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A method for manufacturing a mask includes providing, on a stage, a mask frame in which a plurality of cell openings is defined; providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, where the second area is disposed around each of the first areas; emitting a laser beam to the second area to harden the second area; and removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively.

公开(公告)号：US20230416901A1

公开(公告)日：2023-12-28

申请号：US18125885

申请日：2023-03-24

Applicant: Samsung Display Co., Ltd.

Inventor： Dahee Jeong ,  Sangha Park ,  Seungyong Song ,  Eunbee Jo ,  Youngsuck Choi ,  Kyuhwan Hwang

IPC: C23C14/04 ,  H10K59/12 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K59/1201

Abstract: An apparatus for manufacturing a display device includes a mask assembly that includes a mask frame including an opening area, at least one shield stick fixed on the mask frame in a tensioned state across the opening area of the mask frame, and a plurality of mask sheets covering at least part of the opening area of the mask frame and at least partially overlapping the at least one shield stick. The at least one shield stick includes a first shield member, a second shield member at least partially overlapping the first shield member, and a third shield member at least partially overlapping the first shield member. The second shield member and the third shield member are disposed above the first shield member and are closer to the plurality of mask sheets than the first shield member is close to the plurality of mask sheets.

公开(公告)号：US11619885B2

公开(公告)日：2023-04-04

申请号：US17677188

申请日：2022-02-22

Applicant: Samsung Display Co., Ltd.

Inventor： Junho Jo ,  Youngho Park ,  Seungyong Song ,  Youngchul Lee ,  Youngsuck Choi

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.