公开(公告)号：US20230226643A1

公开(公告)日：2023-07-20

申请号：US17970390

申请日：2022-10-20

Applicant: Samsung Display Co., Ltd.

Inventor： JOONHYUNG KIM ,  WOOHYUN KIM ,  DAEWOANG PARK ,  SEUNGIL JANG

IPC: B23K26/36 ,  B23K26/06 ,  B23K26/073

CPC classification number: B23K26/36 ,  B23K26/0648 ,  B23K26/0736 ,  B23K26/0604 ,  B23K2101/36

Abstract: A laser ablation device includes: a laser irradiation part to emit a plurality of solid-state laser beams; an optical system to convert the plurality of solid-state laser beams into output light; and a stage to receive an irradiation target to be irradiated with the output light. A minor axis of the output light has a semi-super Gaussian profile of order 2 to order 2.4.