公开(公告)号：US11309205B2

公开(公告)日：2022-04-19

申请号：US16591369

申请日：2019-10-02

Applicant: Samsung Display Co., Ltd.

Inventor： Min Ho Bae ,  Hyok Keo Se Kwon ,  Tae Ho Youn

IPC: H01L21/683 ,  H01L21/67

Abstract: An electrostatic chuck and an electrostatic adsorption apparatus including the same are disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The through holes each have a rectangular shape, and each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.