SUBSTRATE TRANSFERRING APPARATUS
    1.
    发明申请
    SUBSTRATE TRANSFERRING APPARATUS 审中-公开
    基板传送装置

    公开(公告)号:US20150034454A1

    公开(公告)日:2015-02-05

    申请号:US14450439

    申请日:2014-08-04

    CPC classification number: B65G39/12 B65G49/064 H01L21/67706

    Abstract: A substrate transferring apparatus includes a first conveyer line assembly which transfers a substrate in a first direction, and includes a first base frame extending along the first direction, first and second pulleys respectively disposed at both end parts of the first base frame in the first direction, and a conveyer belt disposed on the first base frame, and driven by the first and second pulleys, and a first roller line assembly spaced apart from the first conveyer line assembly in a second direction which is substantially perpendicular to the first direction, and including a second base frame extending along the first direction, and a first roller part connected to the second base frame and including a plurality of rollers which contacts to the substrate.

    Abstract translation: 基板转印装置包括:沿第一方向转移基板的第一输送线组件,并且包括沿着第一方向延伸的第一基架;第一和第二滑轮,分别设置在第一基架的第一方向的两端部 以及设置在所述第一基座框架上并由所述第一和第二滑轮驱动的输送带以及与所述第一输送线组件在基本上垂直于所述第一方向的第二方向间隔开的第一辊线组件,并且包括 沿着第一方向延伸的第二基架,以及连接到第二基架的第一辊部,并且包括与基板接触的多个辊。

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