公开(公告)号：US09824910B2

公开(公告)日：2017-11-21

申请号：US14740799

申请日：2015-06-16

Applicant: Samsung Display Co., Ltd.

Inventor： Valeriy Prushinskiy ,  Min Soo Kim ,  Sok Won Noh

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  Y10T279/23

Abstract: An electrostatic chuck is disclosed. In one aspect, the electrostatic chuck includes a top plate, wherein first and second regions adjacent to each other are formed at a surface of the top plate. The electrostatic chuck also includes a first absorption plate positioned at the first region and a second absorption plate positioned at the second region to be separated from the first absorption plate. The first and second absorption plates are configured to support the absorption target.