公开(公告)号：US20190322092A1

公开(公告)日：2019-10-24

申请号：US16252677

申请日：2019-01-20

Applicant: Samsung Display Co., Ltd.

Inventor： Taejin KIM ,  Sukju Kang ,  Sangcheol Kim

IPC: B32B37/00 ,  B32B38/00 ,  B32B38/10

Abstract: A method of stably and precisely attaching substrates and an apparatus for stably and precisely attaching substrates, the method including: placing a substrate, attached with a release film, on a shuttle stage; peeling the release film from the substrate; a transferring unit lifting the substrate from the shuttle stage; a gas supplier spraying gas toward the substrate so that the substrate is convexly curved in a direction away from the gas supplier; the substrate transferred into a chamber by the transferring unit; placing the substrate on a main stage in the chamber; and attaching the substrate to an adherend.

公开(公告)号：US10773505B2

公开(公告)日：2020-09-15

申请号：US16252677

申请日：2019-01-20

Applicant: Samsung Display Co., Ltd.

Inventor： Taejin Kim ,  Sukju Kang ,  Sangcheol Kim

IPC: B32B37/00 ,  B32B38/10 ,  B32B38/00 ,  B32B37/12 ,  B32B38/18 ,  H01L21/67 ,  H01L21/683

Abstract: A method of stably and precisely attaching substrates and an apparatus for stably and precisely attaching substrates, the method including: placing a substrate, attached with a release film, on a shuttle stage; peeling the release film from the substrate; a transferring unit lifting the substrate from the shuttle stage; a gas supplier spraying gas toward the substrate so that the substrate is convexly curved in a direction away from the gas supplier; the substrate transferred into a chamber by the transferring unit; placing the substrate on a main stage in the chamber; and attaching the substrate to an adherend.