公开(公告)号：US20150040826A1

公开(公告)日：2015-02-12

申请号：US14248483

申请日：2014-04-09

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Woo JUNG ,  Sang-Yun LEE ,  Yong-Hwan KIM

IPC: C23F1/02 ,  G03F7/30 ,  G03F7/40 ,  B05C21/00

CPC classification number: C23F1/02 ,  C23C14/042 ,  G03F7/12 ,  G03F7/2032 ,  H01L51/0011

Abstract: A method for manufacturing a metal mask includes defining pattern areas exposing an upper surface, and a lower surface opposite to the upper surface, of a thin plate; and etching the upper and lower surfaces of the thin film plate exposed by the pattern areas, to reduce a thickness of the thin film plate by a predetermined thickness and form deposition openings in the metal mask. The etching the upper and lower surfaces of the thin film plate includes both a wet-etching method and a dry-etching method.

Abstract translation: 制造金属掩模的方法包括限定暴露薄板的上表面和与上表面相对的下表面的图案区域; 并且蚀刻由图案区域暴露的薄膜板的上表面和下表面，以将薄膜板的厚度减小预定厚度，并在金属掩模中形成沉积开口。 蚀刻薄膜板的上表面和下表面都包括湿蚀刻方法和干蚀刻方法。

公开(公告)号：US20140230219A1

公开(公告)日：2014-08-21

申请号：US14017356

申请日：2013-09-04

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sang-Yun LEE

IPC: C23C14/04

CPC classification number: C23C14/042 ,  Y10T29/49826

Abstract: A method of manufacturing a deposition mask includes providing a frame including a pair of first supports and a pair of second supports surrounding an opening, each of the first supports including a contact face corresponding to a face of the first support and including a fastening recess at an outer edge of the first support, inserting an insertion block corresponding in shape to the fastening recess into the fastening recess, bonding opposing ends of a mask strip having an opening pattern to the contact faces while stretching the mask strip, and removing the insertion block from the fastening recess.

Abstract translation: 一种制造沉积掩模的方法包括提供包括一对第一支撑件和围绕开口的一对第二支撑件的框架，每个第一支撑件包括对应于第一支撑件的表面的接触面，并且包括紧固凹部 所述第一支撑件的外边缘将形状相对应的插入块插入到所述紧固凹部中，将具有开口图案的掩模条的相对端部接合到所述接触面，同时拉伸所述掩模条，并且移除所述插入块 从紧固凹槽。