公开(公告)号：US20140373784A1

公开(公告)日：2014-12-25

申请号：US14484691

申请日：2014-09-12

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu SEO ,  Sang-Jin HAN ,  Cheol-Lae ROH ,  Jae-Hong AHN

IPC: C23C16/448

CPC classification number: C23C16/4485 ,  C23C14/243 ,  C23C14/26

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

Abstract translation: 公开了一种线性蒸发源及其沉积装置。 在一个实施例中，线性蒸发源包括i）坩埚在其一侧开口并被构造成存储沉积材料，以及ii）分隔坩埚内部空间的多个隔板，其中每个隔板具有至少一个 在其下部开口。 该源还包括i）位于坩埚的开放侧上并包括多个喷嘴的喷嘴部分，ii）加热器，其构造成加热坩埚，以及iii）壳体，其构造成容纳坩埚，喷嘴部分和 加热器。

公开(公告)号：US20180155831A1

公开(公告)日：2018-06-07

申请号：US15884236

申请日：2018-01-30

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu SEO ,  Sang-Jin HAN ,  Cheol-Lae ROH ,  Jae-Hong AHN

IPC: C23C16/448 ,  C23C14/24 ,  C23C14/26

CPC classification number: C23C14/243 ,  C23C14/26 ,  C23C16/4485

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

公开(公告)号：US20190323119A1

公开(公告)日：2019-10-24

申请号：US16457722

申请日：2019-06-28

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Gyu SEO ,  Sang-Jin HAN ,  Cheol-Lae ROH ,  Jae-Hong AHN

IPC: C23C14/24 ,  C23C14/26

Abstract: A linear evaporation source and a deposition apparatus having the same are disclosed. In one aspect, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.