公开(公告)号：US20160154320A1

公开(公告)日：2016-06-02

申请号：US15014746

申请日：2016-02-03

Applicant: Samsung Display Co., Ltd.

Inventor： Ja Yul KIM ,  Sang Don Jang ,  Tae Kyu Son

IPC: G03F7/20

CPC classification number: G03F7/707 ,  G03F7/70775 ,  H01L21/681 ,  Y10T29/49998 ,  Y10T29/53013 ,  Y10T29/53022 ,  Y10T29/53052 ,  Y10T29/53061 ,  Y10T29/53087 ,  Y10T29/53091 ,  Y10T279/21

Abstract: Exemplary embodiments of the invention disclose an exposure apparatus and a method of tuning parameters of a chuck, which may reduce a time taken to level the chuck by previously tuning parameters of the chuck. The method of tuning parameters of a chuck includes detecting a tilt component of the chuck, performing chuck tilt adjustment to minimize the tilt component of the chuck, and tuning the parameters of the chuck if a residual tilt component is present after performing the chuck tilt adjustment.

公开(公告)号：US09366975B2

公开(公告)日：2016-06-14

申请号：US13959864

申请日：2013-08-06

Applicant: Samsung Display Co., Ltd.

Inventor： Hi Kuk Lee ,  Sang Don Jang ,  Jae Hyuk Chang ,  Hyang-Shik Kong ,  Cha-Dong Kim ,  Chang Hoon Kim ,  Jung-In Park ,  Sang Hyun Yun

IPC: G01B11/02 ,  G03F7/20

CPC classification number: G03F7/70775

Abstract: A stage transferring device invention includes: a transferring stage upon which an object is mounted and which transfers the object in an x-y plane; and a stage position measuring device. The stage position measuring device includes a one-dimensional scale on the transferring stage; a one-dimensional scale reading head which is configured to overlap the one-dimensional scale, irradiate a measuring beam to the overlapped one-dimensional scale and measure a 1D y-axis coordinate of the transferring stage; a two-dimensional encoder on the transferring stage; and a two-dimensional encoder reading head which is configured to overlap the two-dimensional encoder, irradiate a measuring beam to the overlapped two-dimensional encoder and measure a 2D x-axis coordinate and a 2D y-axis coordinate of the transferring stage.

Abstract translation: 舞台转移装置发明包括：传送台，物体安装在该传送台上，并在x-y平面内传送物体; 和台架位置测量装置。 舞台位置测量装置在转印台上包括一维刻度; 被配置为与一维刻度重叠的一维刻度读取头，将测量光束照射到重叠的一维刻度并测量转印台的1Dy轴坐标; 转印台上的二维编码器; 以及被构造成与二维编码器重叠的二维编码器读取头，将测量光束照射到重叠的二维编码器，并测量转印台的2D x轴坐标和2D y轴坐标。