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公开(公告)号:US20230227961A1
公开(公告)日:2023-07-20
申请号:US18076487
申请日:2022-12-07
Applicant: Samsung Display Co., Ltd.
Inventor: JAEMIN HONG , SUNG JIN NA , HEESEAK NOH , SEONGCHEOL LEE
CPC classification number: C23C14/042 , H01L51/0011 , H01L51/56
Abstract: A mask assembly includes a frame including long side portions extending in a first direction and spaced apart from each other in a second direction intersecting the first direction, and short side portions connected to the long side portions, the frame defining a frame opening, a first stick extending in the second direction and connected to the frame, a first mask sheet defining first deposition openings and connected to the first stick and the frame, at least part of the first deposition openings arranged in the first direction and overlapping the frame opening in a plan view, and a second mask sheet defining second deposition openings and connected to the first stick and the frame, at least part of the second mask sheet arranged in the first direction and overlapping the frame opening in a plan view.