公开(公告)号：US20230221642A1

公开(公告)日：2023-07-13

申请号：US18083719

申请日：2022-12-19

Applicant: Samsung Display Co., Ltd.

Inventor： CHEOLRAE JO ,  CHEOLLAE ROH ,  SANGJIN HAN ,  SEUNGHO MYOUNG

IPC: G03F7/09 ,  G03F1/60 ,  G03F1/68

CPC classification number: G03F7/09 ,  G03F1/60 ,  G03F1/68 ,  G01C19/04

Abstract: A mask, a mask assembly including a mask, and a substrate transfer apparatus including a mask. According to an embodiment, a mask includes a frame including an opening, accommodation structure disposed on the frame and including an accommodation space shielded from an outside, and a sensor disposed in the accommodation space.