公开(公告)号：US20220181196A1

公开(公告)日：2022-06-09

申请号：US17402923

申请日：2021-08-16

Applicant: Samsung Display Co., Ltd.

Inventor： Gyungmin Baek ,  Hyunah Sung ,  Hyuneok Shin ,  Namwook Kang ,  Dooseon Yu ,  You Jong Lee

IPC: H01L21/687 ,  H01L21/683 ,  C23C14/50

Abstract: A deposition apparatus includes: a susceptor provided with a plurality of susceptor holes defined therein; an electrostatic chuck disposed on the susceptor and provided with a plurality of electrostatic chuck holes defined therein; and a plurality of pins penetrating through the susceptor and the electrostatic chuck to connect the susceptor and the electrostatic chuck. Each of the pins includes a first portion disposed in a corresponding electrostatic chuck hole of the plurality of electrostatic chuck holes and a second portion disposed in a corresponding susceptor hole of the plurality of susceptor holes. The first portion includes a first base portion and a first cooler disposed in the first base portion.